Layer termination from ellipsometric knowledge is fully integrated into Aeres®. Several different multi-wavelength and spectroscopic ellipsometry solutions can be found Together with the ion beam sputter deposition process.
In-situ optical checking and Regulate is accessible by Angstrom’s optical checking & Management deal.
Goal rotation and carousel indexing Every have torque sense, preventing any process challenges due to slips or jams in rotation.
The dimensions, position, and equipment ratio of each and every World are optimized to deliver the absolute best probable movie thickness uniformity.
Our Reticle® ion beam sputter deposition techniques are designed and engineered to make precise optical films of the highest purity, density, and steadiness.
Variable angle levels allow for incredibly potent slim film approaches. Nonetheless, one among its major issues is reproducibility. The substrate is commonly set at an exceptionally oblique angle in relation for the resource, as well as movies are incredibly sensitive to your precision of the angle.
Angstrom Engineering® layouts and engineers Every Reticle® platform to offer our companions while in the optics Group the chance to create the movies they have to have with excellent purity, density, and uniformity, all within a highly repeatable and automatic manner.
Our distinctive design permits immediate or indirect checking of your variable angle stage, doing away with the necessity for tooling factors or even a witness glass changer. Find out more about the Optical Checking & Control offer listed here.
As well as sample rotation, the variable angle phase which is utilized for Reticle® delivers for in-built angular motion with the deposition flux.
All typical Reticle® platforms include things like yet another gridless close-Corridor ion source with hollow cathode neutralizer.
The deposition ion supply is directed toward a cloth focus on that has been optimized in both of those Tantalum sputtering targets size and situation for your necessary deposition geometry.
Self-aligned ion optics are configured especially for the specified deposition requirements and geometry of your method.
A low-frequency neutralizer guarantees secure beam operation without contamination from a traditional filament.
A shuttered QCM Positioned near the substrate offers comments around the deposition rate and Actual physical thickness of your rising film.
Every single axis of motion is managed by means of Aeres® working with precision servo motors, offering better than 0.one degrees of positional accuracy. Entrance side infrared heating bulbs tilt While using the stage to provide a regular temperature profile for reactive processes.